Cover Image

MEMS, MOEMS, and micromachining II : 3-4 April 2006, Strasbourg, France /

Bibliographic Details
Corporate Authors: SPIE Europe, Bas-Rhin (France). Conseil général, Comité National d'Optique et de Photonique, Society of Photo-optical Instrumentation Engineers
Other Authors: Urey, Hakan, 1970-, El-Fatatry, Ayman
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2006]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 6186.
Subjects:
Microelectromechanical systems > Congresses.
Optoelectronic devices > Congresses.
Micromachining > Congresses.
Description
Physical Description:1 volume (various pagings) : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:081946242X