MEMS, MOEMS, and micromachining II : 3-4 April 2006, Strasbourg, France /

Bibliographic Details
Corporate Authors:	SPIE Europe, Bas-Rhin (France). Conseil général, Comité National d'Optique et de Photonique, Society of Photo-optical Instrumentation Engineers
Other Authors:	Urey, Hakan, 1970-, El-Fatatry, Ayman
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2006]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6186.
Subjects:	Microelectromechanical systems > Congresses. Optoelectronic devices > Congresses. Micromachining > Congresses.

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