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Micromachined thin-film sensors for SOI-CMOS co-integration /

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Bibliographic Details
Main Author: Laconte, J. (Jean)
Other Authors: Flandre, Denis, Raskin, J.-P. (Jean-Pierre), 1971-
Format: Book
Language:English
Published: Dordrecht : Springer, [2006]
Subjects:
Gas flow.
Thin film devices.
Silicon-on-insulator technology.
Metal oxide semiconductors, Complementary.
Description
Physical Description:xiii, 292 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references (pages 265-287) and index.
ISBN:0387288422