Micromachined thin-film sensors for SOI-CMOS co-integration /

Bibliographic Details

Main Author:	Laconte, J. (Jean)
Other Authors:	Flandre, Denis, Raskin, J.-P. (Jean-Pierre), 1971-
Format:	Book
Language:	English
Published:	Dordrecht : Springer, [2006]
Subjects:	Gas flow. Thin film devices. Silicon-on-insulator technology. Metal oxide semiconductors, Complementary.