Kim, S., & Boyd, J. G. (2005). Experimental study of the residual stress-induced self-assembly of MEMS structures during deposition. [Texas A&M University].
Chicago Style (17th ed.) CitationKim, Sang-Hyun, and James G. Boyd. Experimental Study of the Residual Stress-induced Self-assembly of MEMS Structures During Deposition. [College Station, Tex.]: [Texas A&M University], 2005.
MLA (9th ed.) CitationKim, Sang-Hyun, and James G. Boyd. Experimental Study of the Residual Stress-induced Self-assembly of MEMS Structures During Deposition. [Texas A&M University], 2005.
Warning: These citations may not always be 100% accurate.