Experimental study of the residual stress-induced self-assembly of MEMS structures during deposition /

Bibliographic Details

Main Author:	Kim, Sang-Hyun, 1970-
Other Authors:	Boyd, James G. (Thesis advisor)
Format:	Thesis eBook
Language:	English
Published:	[College Station, Tex.] : [Texas A&M University], [2005]
Subjects:	Major Aerospace Engineering. Self-Assembly MEMS
Online Access:	Link to OAK Trust copy