Cover Image

Defects in high-k gate dielectric stacks : nano-electronic semiconductor devices /

Show other versions (1)
Bibliographic Details
Corporate Author: NATO Advanced Research Workshop on Defects in High-k Dielectric Nano-electronic Semiconductor Devices Saint Petersburg, Russia
Other Authors: Gusev, Evgeni
Format: Conference Proceeding Book
Language:English
Published: Dordrecht : Springer, [2006]
Series:NATO science series. Mathematics, physics, and chemistry ; v. 216.
Subjects:
Gate array circuits > Congresses.
Dielectrics > Congresses.
Semiconductors > Defects > Congresses.
Description
Item Description:"Proceedings of the NATO Advanced Research Workshop on Defects in Advanced High-k Dielectric Nano-electronic Semiconductor Devices, held July 11-14, 2005, in St. Petersburg, Russia."--Colophon.
Physical Description:x, 492 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and indexes
ISBN:1402043651 (hd.bd.)
1402043678 (e-book)