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Journal of vacuum science & technology. B, Microelectronics processing and phenomena.

Bibliographic Details
New Title:Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)
Previous Title:Journal of vacuum science and technology (Online)
Uniform Title:Journal of vacuum science & technology.
Corporate Authors: American Vacuum Society, American Institute of Physics
Format: Journal
Language:English
Published: New York, N.Y. : By the American Institute of Physics for the AVS, ©1983-©1990.
Subjects:
Vacuum technology > Periodicals.
Online Availability: Check for online availability
Description
Published:2nd ser., v. 1, no. 1 (Jan./Mar. 1983)-2nd ser., v. 8, no. 6 (Nov./Dec. 1990).
Item Description:Title from PDF issue table of contents (Scitation site, viewed Sept. 21, 2006).
Electronic resource.
Physical Description:Also issued in print.
Publication Frequency:Bimonthly, 1985-1990
Format:Mode of access: World Wide Web.
ISSN:1520-8567