Journal of vacuum science & technology. B, Microelectronics processing and phenomena.

Bibliographic Details

New Title:	Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)
Previous Title:	Journal of vacuum science and technology (Online)
Uniform Title:	Journal of vacuum science & technology.
Corporate Authors:	American Vacuum Society, American Institute of Physics
Format:	Journal
Language:	English
Published:	New York, N.Y. : By the American Institute of Physics for the AVS, ©1983-©1990.
Subjects:	Vacuum technology > Periodicals.
Online Availability: