ICO20 : MEMS, MOEMS, and NEMS : 21-26 August 2005, Changchun, China /

Bibliographic Details
Corporate Authors:	International Commission for Optics, United States. Air Force. Office of Scientific Research. Asia Office, Society of Photo-optical Instrumentation Engineers
Other Authors:	Esashi, Masayoshi, 1949-, Zhou, Zhaoying
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2006]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6032.
Subjects:	Microelectromechanical systems > Congresses. Imaging systems > Congresses. Optoelectronic devices > Congresses. Nanostructured materials > Congresses. Nanotechnology > Congresses.

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