MEMS/MOEMS components and their applications III : 23-25 January 2006, San Jose, California, USA /
| Corporate Authors: | , |
|---|---|
| Other Authors: | , , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
[2006]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 6113. |
| Subjects: |
| Physical Description: | 1 volume (various pagings) : illustrations ; 28 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819461555 |