MEMS/MOEMS components and their applications III : 23-25 January 2006, San Jose, California, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Center for Adaptive Optics (U.S.)
Other Authors:	Olivier, Scot S., Tadigadapa, Srinivas A., Henning, Albert Karl
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2006]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6113.
Subjects:	Microelectromechanical systems > Congresses. Optoelectronic devices > Congresses.

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