Reliability, packaging, testing, and characterization of MEMS/MOEMS V : 25-26 January 2006, San Jose, California, USA /
| Corporate Author: | |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
[2006]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 6111. |
| Subjects: |
| Item Description: | Some previous conferences entitled: Reliability, testing, and characterization of MEMS/MOEMS |
|---|---|
| Physical Description: | 1 volume (various pagings) : illustrations ; 28 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819461539 |