Reliability, packaging, testing, and characterization of MEMS/MOEMS V : 25-26 January 2006, San Jose, California, USA /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Tanner, Danelle Mary, 1952-, Ramesham, Rajeshuni
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2006]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6111.
Subjects:	Microelectromechanical systems > Reliability > Congresses. Microelectromechanical systems > Testing > Congresses. Microelectronic packaging > Congresses.

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