Micromachining technology for micro-optics and nano-optics IV : 23-25 January 2006, San Jose, California, USA /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Johnson, Eric G. (Eric Gordon), Nordin, Gregory P., Suleski, Thomas J., 1969-
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2006]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6110.
Subjects:	Integrated optics > Congresses. Miniature electronic equipment > Design and construction > Congresses. Optoelectronic devices > Design and construction > Congresses. Micromachining > Congresses. Microelectromechanical systems > Congresses.

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