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Chemical-mechanical planarization--integration, technology and reliability : symposium held March 28-31, 2005, San Francisco, California, U.S.A. /

Bibliographic Details
Corporate Authors: Materials Research Society. Fall Meeting, Symposium on Chemical-Mechanical Planarization--Integration, Technology and Reliability
Other Authors: Kumar, Ashok
Format: Conference Proceeding Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2005]
Series:Materials Research Society symposia proceedings ; v. 867.
Subjects:
Microelectronics > Materials > Congresses.
Grinding and polishing > Congresses.
Metals > Pickling > Congresses.
Semiconductors > Surfaces > Congresses.
Description
Item Description:"This volume features papers from Symposium W, 'Chemical-Mechanical Planarization--Integration, Technology and Reliability, ' held March 28-31 at the 2005 MRS Spring Meeting in San Francisco, California ..."--Pref.
Physical Description:xi, 302 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558998209