Chemical-mechanical planarization--integration, technology and reliability : symposium held March 28-31, 2005, San Francisco, California, U.S.A. /

Bibliographic Details
Corporate Authors:	Materials Research Society. Fall Meeting, Symposium on Chemical-Mechanical Planarization--Integration, Technology and Reliability
Other Authors:	Kumar, Ashok
Format:	Conference Proceeding Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [2005]
Series:	Materials Research Society symposia proceedings ; v. 867.
Subjects:	Microelectronics > Materials > Congresses. Grinding and polishing > Congresses. Metals > Pickling > Congresses. Semiconductors > Surfaces > Congresses.

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