APA (7th ed.) Citation

Materials Research Society. Fall Meeting, Symposium on Chemical-Mechanical Planarization--Integration, Technology and Reliability, & Kumar, A. (2005). Chemical-mechanical planarization--integration, technology and reliability: Symposium held March 28-31, 2005, San Francisco, California, U.S.A. Materials Research Society.

Chicago Style (17th ed.) Citation

Materials Research Society. Fall Meeting, Technology and Reliability Symposium on Chemical-Mechanical Planarization--Integration, and Ashok Kumar. Chemical-mechanical Planarization--integration, Technology and Reliability: Symposium Held March 28-31, 2005, San Francisco, California, U.S.A. Warrendale, Pa.: Materials Research Society, 2005.

MLA (9th ed.) Citation

Materials Research Society. Fall Meeting, et al. Chemical-mechanical Planarization--integration, Technology and Reliability: Symposium Held March 28-31, 2005, San Francisco, California, U.S.A. Materials Research Society, 2005.