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Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Queensland University of Technology, University of Adelaide, University of Adelaide. Centre for Biomedical Engineering
Other Authors: Chiao, Jung-Chih
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2006]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 6037.
Subjects:
Microelectromechanical systems > Congresses.
Photonics > Congresses.
Photomechanical processes > Congresses.
Photolithography > Congresses.
Description
Item Description:Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics.
Physical Description:1 volume (various pagings) : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819460680