Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Queensland University of Technology, University of Adelaide, University of Adelaide. Centre for Biomedical Engineering
Other Authors:	Chiao, Jung-Chih
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2006]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6037.
Subjects:	Microelectromechanical systems > Congresses. Photonics > Congresses. Photomechanical processes > Congresses. Photolithography > Congresses.

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