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Micro- and nanosystems--materials and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A. /

Bibliographic Details
Corporate Authors: Materials Research Society. Fall Meeting, Symposium on Micro- and Nanosystems--Materials and Devices
Other Authors: Ozkan, Cengiz S.
Format: Conference Proceeding Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2005]
Series:Materials Research Society symposia proceedings ; v. 872.
Subjects:
Microelectromechanical systems > Congresses.
Nanotechnology > Congresses.
Description
Item Description:"Symposium J, 'Micro- and Nanosystems--Materials and Devices' [was] held March-28-April 1 at the 2005 MRS Spring Meeting in San Francisco, California ..."--Pref.
Physical Description:xv, 525 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558998268