Micro- and nanosystems--materials and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A. /

Bibliographic Details
Corporate Authors:	Materials Research Society. Fall Meeting, Symposium on Micro- and Nanosystems--Materials and Devices
Other Authors:	Ozkan, Cengiz S.
Format:	Conference Proceeding Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [2005]
Series:	Materials Research Society symposia proceedings ; v. 872.
Subjects:	Microelectromechanical systems > Congresses. Nanotechnology > Congresses.

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