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Tribology in chemical-mechanical planarization /

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Bibliographic Details
Main Author: Liang, Hong, 1961-
Other Authors: Craven, David R., 1945-
Format: Book
Language:English
Published: Boca Raton, Fla. : Taylor & Francis, 2005.
Subjects:
Tribology.
Grinding and polishing.
Chemical mechanical planarization.
Online Access:Publisher description
Description
Physical Description:185 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0824725670 (alk. paper)
9780824725679 (alk. paper)