Tribology in chemical-mechanical planarization /

Bibliographic Details

Main Author:	Liang, Hong, 1961-
Other Authors:	Craven, David R., 1945-
Format:	Book
Language:	English
Published:	Boca Raton, Fla. : Taylor & Francis, 2005.
Subjects:	Tribology. Grinding and polishing. Chemical mechanical planarization.
Online Access:	Publisher description