Characterization and metrology for ULSI technology : Richardson, Texas, 15-18 March 2005 /

Bibliographic Details
Corporate Authors:	International Conference on Characterization and Metrology for ULSI Technology Richardson, Tex., National Institute of Standards and Technology (U.S.)
Other Authors:	Seiler, David G.
Format:	Conference Proceeding Book
Language:	English
Published:	Melville, N.Y. : American Institute of Physics, 2005.
Series:	AIP conference proceedings. v. 788.
Subjects:	Integrated circuits > Ultra large scale integration > Congresses. Integrated circuits > Ultra large scale integration > Congresses > Software.

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