Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Assoufid, Lahsen, Takacs, Peter Z., Taylor, J. S. (John S.)
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2005]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5921.
Subjects:	Optical measurements > Congresses. Optical instruments > Design and construction > Congresses. Measuring instruments > Design and construction > Congresses. Laser interferometers > Congresses. Measurement > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/5921.toc

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