Smart sensors and MEMS /

Bibliographic Details
Corporate Authors:	NATO Advanced Study Institute on Smart Sensors and MEMS Povoa de Varzim, Portugal, North Atlantic Treaty Organization. Scientific Affairs Division
Other Authors:	Yurish, Sergey Y., Gomes, Maria Teresa S. R.
Format:	Conference Proceeding Book
Language:	English
Published:	Dordrecht ; Boston : Kluwer Academic Publishers, [2004]
Series:	NATO science series. Mathematics, physics, and chemistry ; v. 181.
Subjects:	Detectors > Congresses. Microelectromechanical systems > Congresses. Scanning systems > Congresses. Smart sensors

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