Cover Image

Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain /

Bibliographic Details
Corporate Authors: SPIE Europe, AnaFocus, Centro Nacional de Microelectrónica (Spain), Society of Photo-optical Instrumentation Engineers
Other Authors: Cané, Carles, Chiao, Jung-Chih, Verdú, Fernando Vidal
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2005]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5836.
Subjects:
Microelectromechanical systems > Congresses.
Microtechnology > Congresses.
Actuators > Industrial applications > Congresses.
Detectors > Industrial applications > Congresses.
Scanning systems > Congresses.
Description
Physical Description:xv, 730 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819458317