Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain /

Bibliographic Details
Corporate Authors:	SPIE Europe, AnaFocus, Centro Nacional de Microelectrónica (Spain), Society of Photo-optical Instrumentation Engineers
Other Authors:	Cané, Carles, Chiao, Jung-Chih, Verdú, Fernando Vidal
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2005]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5836.
Subjects:	Microelectromechanical systems > Congresses. Microtechnology > Congresses. Actuators > Industrial applications > Congresses. Detectors > Industrial applications > Congresses. Scanning systems > Congresses.

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