Nano- and micro-metrology : 16-17 June 2005, Munich, Germany /
| Corporate Authors: | , , |
|---|---|
| Other Authors: | , , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
[2005]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 5858. |
| Subjects: | |
| Online Access: | https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/5858.toc |
Internet
https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/5858.tocRemote Storage
| Call Number: |
QC367 .N36 2005 |
|
|---|---|---|
| Call Number | Status | Get It |
| QC367 .N36 2005 | Available | |