Design and control of a 6-Degree-of-Freedom levitated positioner with high precision /

Bibliographic Details

Main Author:	Hu, Tiejun, 1977-
Other Authors:	Kim, Wŏn-jong (Thesis advisor)
Format:	Thesis eBook
Language:	English
Published:	[College Station, Tex.] : [Texas A&M University], [2005]
Subjects:	Major mechanical engineering. permanent magnet synchronous planar motor high precision motion control nano-positioning
Online Access:	Link to OAK Trust copy