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Micro-optomechatronics /

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Bibliographic Details
Other Authors: Hosaka, Hiroshi, 1956-
Format: Book
Language:English
Published: New York : Marcel Dekker, [2005]
Series:Optical engineering (Marcel Dekker, Inc.) ; v. 92.
Subjects:
Microelectromechanical systems.
Mechatronics.
Nanotechnology.
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Published 2005
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