Micro-optomechatronics /

Bibliographic Details

Other Authors:	Hosaka, Hiroshi, 1956-
Format:	Book
Language:	English
Published:	New York : Marcel Dekker, [2005]
Series:	Optical engineering (Marcel Dekker, Inc.) ; v. 92.
Subjects:	Microelectromechanical systems. Mechatronics. Nanotechnology.