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Micro-optomechatronics /

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Bibliographic Details
Other Authors:	Hosaka, Hiroshi, 1956-
Format:	Book
Language:	English
Published:	New York : Marcel Dekker, [2005]
Series:	Optical engineering (Marcel Dekker, Inc.) ; v. 92.
Subjects:	Microelectromechanical systems. Mechatronics. Nanotechnology.

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