Cover Image

MOEMS : micro-opto-electro-mechanical systems /

Bibliographic Details
Other Authors: Motamedi, M. Edward
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE Press, [2005]
Subjects:
Microelectromechanical systems.
Optoelectronic devices.
Microfabrication.
Online Access:Table of contents
Description
Physical Description:xxi, 614 pages : illustrations ; 27 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819450219