MOEMS : micro-opto-electro-mechanical systems /

Bibliographic Details

Other Authors:	Motamedi, M. Edward
Format:	Book
Language:	English
Published:	Bellingham, Wash. : SPIE Press, [2005]
Subjects:	Microelectromechanical systems. Optoelectronic devices. Microfabrication.
Online Access:	Table of contents