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Testing, reliability, and application of micro- and nano-material systems III : 8-10 March 2005, San Diego, California, USA /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Geer, Robert E.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2005]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5766.
Subjects:
Electrooptical devices > Materials > Testing > Congresses.
Photonics > Materials > Testing > Congresses.
Nanostructured materials > Testing > Congresses.
Microelectromechanical systems > Testing > Congresses.
Description
Physical Description:x, 168 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819457477