Micromachining and microfabrication process technology X : 25-27 January 2005, San Jose, California, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories
Other Authors:	Perez-Maher, Mary Ann, Stewart, Harold D.
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2005]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5715.
Subjects:	Micromachining > Congresses. Microfabrication > Congresses. Electromechanical devices > Design and construction > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/5715.toc

Remote Storage