APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Zhongguo guang xue xue hui, Australian Optical Society, Guo jia zi ran ke xue ji jin wei yuan hui (China), Wang, Y., Yao, J., & Progler, C. J. (2005). Advanced microlithography technologies: 8-10 November 2004, Beijing, China. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Zhongguo guang xue xue hui, Australian Optical Society, Guo jia zi ran ke xue ji jin wei yuan hui (China), Y.-Y Wang, Jun'en Yao, and Christopher J. Progler. Advanced Microlithography Technologies: 8-10 November 2004, Beijing, China. Bellingham, Washington: SPIE, 2005.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Advanced Microlithography Technologies: 8-10 November 2004, Beijing, China. SPIE, 2005.