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CMOS-MEMS /

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Bibliographic Details
Other Authors: Brand, Oliver, 1964-, Fedder, G. K. (Gary K.)
Format: Book
Language:English
Published: Weinheim ; [Great Britain] : Wiley-VCH, [2005]
Series:Advanced micro & nanosystems ; v. 2.
Subjects:
Metal oxide semiconductors, Complementary.
Microelectromechanical systems.
Description
Physical Description:xiv, 594 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:3527310800