CMOS-MEMS /

Bibliographic Details

Other Authors:	Brand, Oliver, 1964-, Fedder, G. K. (Gary K.)
Format:	Book
Language:	English
Published:	Weinheim ; [Great Britain] : Wiley-VCH, [2005]
Series:	Advanced micro & nanosystems ; v. 2.
Subjects:	Metal oxide semiconductors, Complementary. Microelectromechanical systems.