APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories, & El-Fatatry, A. (2005). MOEMS and miniaturized systems V: 25-26 January 2005, San Jose, California, USA. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories, and Ayman El-Fatatry. MOEMS and Miniaturized Systems V: 25-26 January 2005, San Jose, California, USA. Bellingham, Washington: SPIE, 2005.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. MOEMS and Miniaturized Systems V: 25-26 January 2005, San Jose, California, USA. SPIE, 2005.