MOEMS and miniaturized systems V : 25-26 January 2005, San Jose, California, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories
Other Authors:	El-Fatatry, Ayman
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2005]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5719.
Subjects:	Microelectromechanical systems > Congresses. Miniature electronic equipment > Congresses. Micromechanics > Congresses. Optics, Adaptive > Congresses. Optical scanners > Congresses.

Remote Storage