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Micro- and nanotechnology : materials, processes, packaging, and systems II : 13-15 December 2004, Sydney, Australia /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, University of New South Wales, University of Adelaide
Other Authors: Chiao, Jung-Chih
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2005]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5650.
Subjects:
Microelectromechanical systems > Congresses.
Microtechnology > Materials > Congresses.
Nanotechnology > Materials > Congresses.
Electronic packaging > Congresses.
Description
Physical Description:xlviii, 572 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819456101