Micro- and nanotechnology : materials, processes, packaging, and systems II : 13-15 December 2004, Sydney, Australia /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, University of New South Wales, University of Adelaide
Other Authors:	Chiao, Jung-Chih
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2005]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5650.
Subjects:	Microelectromechanical systems > Congresses. Microtechnology > Materials > Congresses. Nanotechnology > Materials > Congresses. Electronic packaging > Congresses.

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