APA (7th ed.) Citation

Symposium on Photomask Technology Monterey, Calif, BACUS (Technical group), Society of Photo-optical Instrumentation Engineers, Staud, W., & Weed, J. T. (2004). 24th Annual BACUS Symposium on Photomask Technology: 14-17 October 2004, Monterey, California, USA. SPIE.

Chicago Style (17th ed.) Citation

Symposium on Photomask Technology Monterey, Calif, BACUS (Technical group), Society of Photo-optical Instrumentation Engineers, Wolfgang Staud, and J. Tracy Weed. 24th Annual BACUS Symposium on Photomask Technology: 14-17 October 2004, Monterey, California, USA. Bellingham, Washington: SPIE, 2004.

MLA (9th ed.) Citation

Symposium on Photomask Technology Monterey, Calif, et al. 24th Annual BACUS Symposium on Photomask Technology: 14-17 October 2004, Monterey, California, USA. SPIE, 2004.