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24th Annual BACUS Symposium on Photomask Technology : 14-17 October 2004, Monterey, California, USA /

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Bibliographic Details
Corporate Authors: Symposium on Photomask Technology Monterey, Calif., BACUS (Technical group), Society of Photo-optical Instrumentation Engineers
Other Authors: Staud, Wolfgang, Weed, J. Tracy
Format: Conference Proceeding Book
Language:English
Published: Bellingham, Washington : SPIE, [2004]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5567.
Subjects:
Integrated circuits > Masks > Congresses.
Microlithography > Congresses.

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Call Number: TK7874 .S9435 2004
Library Owns: TK7874 .S9435 2004 (pt.1-pt.2)
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TK7874 .S9435 2004 pt.1 Available
TK7874 .S9435 2004 pt.2 Available