Introduction to microelectromechanical systems engineering /

Bibliographic Details

Main Author:	Maluf, Nadim
Corporate Author:	NetLibrary, Inc
Other Authors:	Williams, Kirt
Format:	eBook
Language:	English
Published:	Boston : Artech House, [2004]
Edition:	2nd ed.
Series:	Microelectromechanical systems series.
Subjects:	Microelectromechanical systems. Electronic books.
Online Access:	Connect to the full text of this electronic book