Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A. /
| Corporate Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Warrendale, Pa. :
Materials Research Society,
[2004]
|
| Series: | Materials Research Society symposia proceedings ;
v. 816. |
| Subjects: |
| Item Description: | "The papers here were presented at Symposium K, 'Advances in Chemical-Mechanical Polishing,' held at the 204 MRS Spring Meeting in San Francisco, California ..."--p. xi. |
|---|---|
| Physical Description: | xi, 292 pages : illustrations ; 24 cm. |
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 1558997660 |