Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A. /

Bibliographic Details
Corporate Authors:	Materials Research Society. Fall Meeting, Symposium on Advances in Chemical-Mechanical Polishing
Other Authors:	Boning, Duane S.
Format:	Conference Proceeding Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [2004]
Series:	Materials Research Society symposia proceedings ; v. 816.
Subjects:	Electrolytic polishing > Congresses. Grinding and polishing > Congresses.

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